Hitachi is a Japanese multinational conglomerate company with a diverse range of products and services. It was founded in 1910 and is headquartered in Tokyo, Japan. The company operates in various sectors including electronics, construction machinery, power systems, automotive systems, and more.

Hitachi

The Hitachi D-9000 is part of the Conductor Etch System 9000 Series, designed to address the demanding requirements of next-generation semiconductor fabrication processes. It is tailored for manufacturing devices at 20nm and below, which require sophisticated etching techniques including double-patterning and 3D structures. The platform utilizes a proprietary low-contaminant, high-speed transfer system that significantly enhances productivity. It features a modular chamber design that allows for process flexibility and future expansion, accommodating advancements in technology such as the transition to 450-mm wafer sizes. Its microwave Electron Cyclotron Resonance (ECR) plasma etching chamber has been validated for high-volume manufacturing, ensuring reliable performance in critical manufacturing environments. The system supports 300mm wafer diameters and can configure up to 9 chambers, allowing for extensive operational scalability and versatility.

D-9000

by Hitachi

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